Surface excitations in the modelling of electron transport for electron-beam-induced deposition experiments

• Francesc Salvat-Pujol,
• Roser Valentí and
• Wolfgang S. Werner

Beilstein J. Nanotechnol. 2015, 6, 1260–1267, doi:10.3762/bjnano.6.129

• the distribution of energy losses per unit path length, the basic quantity that is needed to describe energy losses in a detailed Monte-Carlo simulation of electron transport. In this section we briefly outline the basic steps of these calculations and highlight the underlying assumptions. Further

• -Carlo simulation of electron transport (see section “Monte-Carlo simulation of electron energy-loss spectra”), a method that has been successfully used in the last decades. Inelastic collisions in the vicinity of a planar surface The scheme outlined in the previous section to describe inelastic

• present a general perspective of recent works on the subject of surface excitations and on low-energy electron transport, highlighting the most relevant aspects for the modelling of electron transport in FEBID simulations. Keywords: focused-electron-beam-induced deposition (FEBID); Monte Carlo simulation